Reactive Sputter Deposition Conference We want to cordially invite you to participate in the RSD 2021 in Leipzig, Germany. It is organized by the Leibniz Institute of Surface Engineering (IOM), which is devoted to research tailoring surface properties, including thin film coatings, using plasmas, ions, electrons, and photons.

RSD 2021 is a sequel to a series of successful conferences dedicated to reactive sputter deposition, which were organized starting from 2000 in different countries by different organizations. The main focus is the use of various magnetron sputtering techniques, but RSD 2021 is also open to other sputter deposition processes, such as, for instance, ion beam sputter deposition. Both fundamental aspects and various fields of application are addressed. The conference is steadily growing and brings together young and senior scientists from universities, research institutes, and industry. It is designed to be a place of lively discussions of current and future scientific and technical results or challenges. Therefore, we will do our best to make the RSD 2021 a successful event benefiting all participants and exhibitors.
AVS Webinar: Area-Selective Deposition Location: Virtual/Online


Area-selective deposition (ASD) is a technology that is currently gathering momentum as enabler for bottom-up fabrication. Its main promise is the ability to process material in a self-aligned fashion, thereby eliminating alignment errors in semiconductor processing. In addition, ASD has been considered for alternative nanofabrication schemes in catalysis. By using mature thin film techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) as a starting point, the development of strategies and approaches to ASD primarily focuses on making the growth selective to specific materials or surfaces. This often involves the selective adsorption of reactant species, or as a more general approach, the deactivation of surfaces on which no growth is desired by selective functionalization. While achieving selective deposition is already difficult, maintaining the selectivity is yet another challenge, as there are numerous side-reactions that could lead to loss of selectivity. In this webinar, several aspects of ASD technology will be addressed, ranging from fundamental surface reactions to technological challenges.
Physics@Veldhoven Physics@Veldhoven takes place each year in January. It is a large congress that provides a topical overview of physics in the Netherlands. Traditionally, young researchers are given the chance to present themselves and their work alongside renowned names from the Dutch and international physics community. The programme covers Statistical physics & soft condensed matter, Physics of fluids, Plasma & fusion physics, Quantum physics, Nanoscale hysics, Atomic, molecular and optical physics, Materials physics, Particle physics, Astroparticle physics and Physics for technology.
AVS Webinar: Fundamental and Practical Insights on Stress Evolution during Thin Film Growth Location: Virtual/Online
Understanding the origin of stress in thin films produced by physical vapor deposition (PVD) is of key importance as excessive stress levels can lead to premature failure by cracking, buckling or interfacial delamination, which compromises device durability.

This webinar will provide an overview on how film stress develops during deposition, how it is affected by the main process parameters, and how to mitigate it. Selected examples from epitaxial, amorphous and polycrystalline thin films will be highlighted, with emphasis on metallic thin films. Models explaining the generation and relaxation of stress will be presented and discussed. The webinar will also cover practical aspects on how to measure stress during growth using wafer curvature methods.
Clean Event Design, production, assembly and packaging An experts view on cleanliness
The cleaning of components is one of the critical steps in modern production processes. Whether it comes to ensuring the required cleanliness for subsequent steps in the process, or guaranteeing the quality and functionality of the component to be cleaned, the cleaning of components is a crucial step in many industries, such as metal working and processing, automotive, medical technology, and aerospace.

meer agenda

Elementaire Vacuümtechniek (EVT)

De cursus is bestemd voor hen, die direct betrokken zijn bij de bediening, controle of het onderhoud van vacuümsystemen of onderdelen daarvan. De nadruk van de cursus ligt op het verwerven van de nodige kennis om deze taken naar behoren te kunnen uitvoeren. De cursisten moeten beschikken over een achtergrond op LBO/VBO-niveau.

Basiskennis verschaffen over de werking en bediening van vacuümapparaten en de techniek van het verkrijgen en handhaven van vacuüm. Na afloop van de cursus moeten de kandidaten een aantal veelgebruikte types vacuümsystemen kunnen opstarten, bedienen, cyclisch gebruiken en uitschakelen/beluchten. Verder wordt van hen verwacht dat zij eenvoudige diagnoses kunnen stellen bij vacuümtechnische problemen (onjuiste werking, niet behalen einddruk, lekkage, etc) en mogelijke oplossingen kunnen aandragen voor herstel. Zij moeten bekend zijn met beveiligings- en onderhoudsaspecten van deze systemen. Ook moeten kandidaten enige kennis hebben van de beveiligingsaspecten en te nemen voorzorgen bij het verpompen van agressieve en/of explosieve gasmengsels (halfgeleiderindustrie). Tenslotte moeten zij eenvoudig onderhoud kunnen plegen aan complete vacuümsystemen en enige mechanische pomptypes.

Korte inhoud
  • algemene fysische basisbegrippen en elementaire rekentechnische vaardigheden
  • werking en toepassingsgebieden van alle gangbare types pompen
  • elementaire kennis omtrent totaaldrukmeters en restgasanalysatoren
  • materialen, verbindingen, bewerkingstechnieken, reiniging
  • verpompen van agressieve gassen en dampen
  • vacuümcomponenten en -systemen; opbouw, bediening, onderhoud en beveiliging
  • opsporen en verhelpen van storingen, lekzoeken
De cursus wordt gegeven aan de hand van het Cursusboek Elementaire Vacuümtechniek (nieuwe volledig bijgewerkte versie per september 2012.

De cursus is afgestemd op het jaarlijks door de NEVAC af te nemen examen Elementaire Vacuümtechniek (EVT; LBO/VBO-niveau)

dr. A.D. van Langeveld, M 06-29561797,
Th. Mulder, T 0348-441878, thmulder36@
D. Schijve, T 0186-600019,


Zie aanvullende info bij inschrijfcursussen

Voor meer informatie, mogelijkheden en prijzen neem contact op met de cursusaanbieders.

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